- •Vacuum technology development
- •1. Words to be remembered.
- •2. Translate the sentences. Pay attention to the words in italics.
- •5. Decide whether the following statements are true or false according to text a.
- •6. Answer the following questions to text a.
- •7. Read text b carefully paying attention to the words in bold type.
- •8. Decide whether the following statements are true or false according to text b.
- •9. Answer the questions to text b.
- •10. Match the words with the synonyms.
- •14. Match the parts of the sentences.
- •16. Grammar Tutorials: Word Order, Miscellaneous
- •17. Translate the following sentences. Notice the difference in the underlined words.
- •19. Translate the text from Russian into English. Use the list of words below for help.
- •Unit II. Theory of pvd Coatings
- •1. Words to be remembered.
- •1. Words to be remembered.
- •2. Translate the sentences. Pay attention to the words in italics.
- •3. Read text a carefully paying attention to the words in bold type.
- •4. Decide whether the following statements are true or false according to text a.
- •5. Answer the following questions to text a.
- •6. Read text b carefully paying attention to the words in bold type.
- •7. Decide whether the following statements are true or false according to text b.
- •8. Answer the questions to text b.
- •10. Make sure you know the meanings of these words. Match the words with their definitions.
- •11. Match the words with the synonyms (text a).
- •12. Match the same words with the antonyms (text a).
- •13. Translate the text on theory and practical use of pvd coatings, study the structure of TiAln. Make its technical and non-technical description.
- •14. Scan the text about Copper (Cu) carefully. Use the scattered Nouns – Verbs – Adjectives – Adverbial Modifiers to make as many correct sentences-statements as possible.
- •17. See the difference in the following words. Use a dictionary. Read all of them aloud. Make some sentences of your own. Some eight examples are given for you.
- •20. Learn the poem “The Planets” by heart. Say, if gold, silver and lead are used in vacuum technologies. What does present-day science say about the content of metals in the planets? The Planets
- •21. Practice makes perfect. Translate the text on Vacuum history in a written form.
- •24. Scan the biography of Michael Faraday. Put questions to the answers given below.
- •25. Look through the texts a-b again and make notes under the following headings. Then use your notes to talk about it.
- •History
- •II. Home Appliances II: Vacuum-Cleaner
- •20. Scan the biography. Put questions to the given answers.
- •Reading, Vocabulary & Creative Practice
- •1. Words to be remembered.
- •2. Translate the sentences. Pay attention to the words in italics.
- •3. Read text a. Pay attention to the words in bold type.
- •4. Decide whether the following statements are true or false according to text a.
- •5. Answer the questions to text a.
- •6. Read text b. Pay attention to the words in bold type.
- •7. Decide whether the following statements are true or false according to text b.
- •8. Answer the questions to text b.
- •13. Special Quiz. Think of the better way to remember the most of the vocabulary and the vacuum pump classification. Share your opinion on it with your partner.
- •Russian English
- •II. Классификация вакуумных насосов по принципу действия
- •15. A) Open the brackets giving the right forms of the words; b) Translate the text “Cryopump” in a written form; c) Compare texts 15.1 and 15.2.
- •16. Grammar Tutorials: Question Technique Read and give a title to the text. Put questions to the given answers.
- •18. Translate from Russian into English. Use the proper grammar rules and the prompting words in brackets.
- •19. Read the text “Pump Accessories”. Pay attention to the abbreviations, and Stone Wall Constructions. Summarize the text.
- •20. Translate the following abbreviations and Stone Wall Constructions.
- •21. Read about some pumps’ features and benefits. Pay attention to the suffixes in the words, describing the pumps. Using the descriptive words, try to persuade the customers to buy the pumps.
- •23. Make notes under the following headings. Then use your notes to talk about it.
- •Unit VI. Pumps and Compressors
- •“First, be sure a thing is wanted or needed, then go ahead.” Thomas Edison.
- •1. Words to be remembered.
- •2. Translate the sentences. Pay attention to the words in italics.
- •3. Read the text a. Pay attention to the words in bold type.
- •4. Decide whether the following statements are true or false according to text a.
- •5. Answer the questions to text a.
- •6. Read text b. Pay attention to the words in bold type.
- •7. Decide whether the following statements are true or false according to text b.
- •8. Answer the questions to text b.
- •10. Match the words with the synonyms.
- •11. Match the words with the antonyms.
- •12. Fill in the correct prepositions.
- •13. Open the brackets. Give the right forms of the words in bold. Translate the text in a written form.
- •14. Special Quiz. Read about the uses of compressors. Match the parts of the sentences making the sentences complete. Start from: Gas compressors are used … … .
- •17. Study the key words to the crossword from Unit III.
- •18. Engineer tested. Do you believe …
- •19. Study the compressor refrigerator schematic, operation and construction. Discuss the information in dialogues. How do you see the compressor refrigerator in the future?
- •Construction
- •20. Scan the biography both I) in English and II) in Russian. Make a close look at English and Russian versions. Find and write down the differences.
- •Follow-up Activity
- •21. Make notes under the following headings. Then use your notes to talk about it.
- •1. Kinetic Devices (General View).
- •Unit VII. Vacuum Engineering and Its Prospects
- •1. Words to be remembered.
- •2. Translate the sentences. Pay attention to the words in italics.
- •3. Read text a. Pay attention to the words in bold type.
- •4. Decide whether the following statements are true or false according to text a.
- •5. Answer the questions to text a.
- •6. Read text b. Pay attention to the words in bold type.
- •7. Decide whether the following statements are true or false according to text b.
- •8. Answer the questions to text b.
- •9. Make sure you know the meanings of these words. Match the words with their definitions. Consult the dictionaries.
- •10. Match the words with the synonyms.
- •11. Match the same words with the antonyms.
- •12. Fill in the correct prepositions.
- •13. Scan the text. Make its summary in Russian then give English translation of the summary.
- •14. 1) Scan the biography of Sir William Crookes. Pay attention to the underlined words and notions. Say or write what you know about them.
- •14. 2) Scan the biography of John Dalton. Put questions to the given answers.
- •15. Scan the article “Vacuum Technology Developed to Control Insects in Wood.” Divide the text into logical parts.
- •17. Read the advertisement. Make everybody trust the method described.
- •19. Read the article “Japanese Camera Used to Test Innovation.” Make up some 3–5 statements of your own which might be a summary to the article.
- •20. Study the suggested key answers to the previous tasks.
- •21. Make notes under the following headings. Then use your notes to talk about it.
- •Permissible pressure units including the torr 1) and its conversion
- •Vocabulary Terms And Abbreviations Used In Vacuum Engineering
- •Casing n оболочка, обшивка; отливка, литье
- •Confine V удерживать
- •Deliberate adj умышленный, обдуманный
- •Develop V развивать, строить, подготавливать, совершенствовать
- •Drastic adj глубокий, интенсивный, резкий
- •Drift n наклонный ствол, отклонение
- •Neutral n нейтральный
- •Vacuum technology development
- •220013, Минск, проспект Независимости, 65.
4. Decide whether the following statements are true or false according to text a.
1. The early Penning discharges used magnetic fields parallel to the sputtering target surface.
2. Magnetron sources in a “closed-loop” pattern can be used to confine electrons near the surface in a closed pattern.
3. These confined electrons generate low- density plasma near the surface.
4. There was a sputtering source known as “S-gun”.
5. A planar magnetron sputtering source was developed by Charlie Chaplin.
6. The “sputter-gun” and the “S-gun” mean the same.
5. Answer the following questions to text a.
1. Are the trajectories of electrons influenced by magnetic fields?
2. What magnetic fields did the early Penning discharges use?
3. Do confined electrons generate high-density plasma near or on the surface?
4. What is a “Sputter-gun”?
5. What are Chapin, Chopin, Chaplin known for?
6. What are the advantages of planar magnetron?
7. What are the disadvantages of the early magnetron sources?
8. Are magnetrons used in everyday life?
6. Read text b carefully paying attention to the words in bold type.
B. Coating Structure and Morphology at an Early Stage
One of the disadvantages of these early magnetron sources was that the plasma was effectively trapped near the surface of the sputtering target. This meant that the reactive gases could not be dissociated effectively near the substrate and the ion bombardment of the substrate was low resulting in poor quality films. The problem was partially solved by adding auxiliary ionization sources or using RF. The invention of the unbalanced magnetron (разбалансированный магнетрон) in 1986 offered a better solution. The unbalanced magnetron allows some electrons to escape from the confining field and create plasma in regions away from the target surface. When the escaping magnetic field is linked to other unbalanced magnetron sources (north to south poles), the plasma generation area can be significantly increased.
With the invention of the scanning electron microscope (SEM), the growth morphology of the deposited coating could be examined. The relationship between the substrate temperature, kinetic energy of the ions and the deposition rate has been summarized in various structure zone models. In 1977 Thornton published a ‘structure zone model’ (SZM) for evaporated coatings. The diagram is known as the ‘Thornton Diagram’ and illustrates the relationship between the coating morphology, the deposition temperature and the pressure in the sputtering chamber. The sputtering pressure determines the flux and energy of the reflected high-energy neutrals from the sputtering cathode. The structure zone model was further refined.
7. Decide whether the following statements are true or false according to text b.
1. One of the advantages of early magnetron sources was that the plasma was trapped near the surface.
2. The unbalanced magnetron allows plasma to be created in regions away from the target surface.
3. The plasma generation area can be increased when the escaping magnetic field is linked to other unbalanced magnetron sources.
4. The growth morphology of the deposited coating could be examined with the invention of the scanning microscope.
5. The sputtering pressure determines the flex.
6. The structure zone model was never refined.