Источники / SiCtechnologyPropertiesApplication

ǿȜȟȠȜȭțȖȓ Ȗ ȝȓȞȟȝȓȘȠȖȐȩ ȞȎȕȐȖȠȖȭ ȢȡțȘȤȖȜțȎșȪțȩȣ ȚȎȠȓȞȖȎșȜȐ Ȓșȭ țȎȡȘȖ Ȗ ȠȓȣțȖȘȖ ®

ǸȎȞȏȖȒȘȞȓȚțȖȭ: ȠȓȣțȜșȜȑȖȭ, ȟȐȜȗȟȠȐȎ, ȝȞȖȚȓțȓțȖȓ/ ǮȑȓȓȐǼ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ., ǹȓȏȓȒȓȐ Ǯ.Ǯ., ǺȖșȓțȖț ǰ.ǰ., ǼȣȞȖȚȓțȘȜ Ǽ.ǯ., ǽȜșȭȘȜȐ ǰ.ǰ., ǿȐȓȠșȖȥțȩȗ Ǯ.Ǻ., ȅȓȞȓȒțȖȥȓțȘȜ Dz.Ƕ. / ǽȜȒȜȏȧȓȗȞȓȒȎȘȤȖȓȗȥșȓț-ȘȜȞȞ. ǻǮǻȁ, Ȓ.Ȣ.-Ț.ț., ȝȞȜȢ. ǯȓșȭȓȐȎǮ.dz.

Ȗ Ȓ.Ƞ.ț., ȝȞȜȢ. ǸȜțȎȘȜȐȜȗ Ǿ.ǰ. – ȃȎȞȪȘȜȐ: «ǶǿǺǮ». 2010. – 532 ȟ.

ISBN 966-02-2555-5 (ȟȓȞȖȭ) ISBN 978-966-02-5445-9

ǻȎȟȠȜȭȧȎȭ ȘȜșșȓȘȠȖȐțȎȭȚȜțȜȑȞȎȢȖȭȟȜȒȓȞȔȖȠȠȓȜȞȓȠȖȥȓȟȘȖȓ ȖȫȘȟȝȓȞȖȚȓțȠȎșȪțȩȓ ȞȓȕȡșȪȠȎȠȩ ȝȜ ȚȓȠȜȒȎȚ ȐȩȞȎȧȖȐȎțȖȭ ȚȜțȜȘȞȖȟȠȎșșȜȐ Ȗ ȫȝȖȠȎȘȟȖȎșȪțȩȣ ȝșȓțȜȘ SiC, Ȏ ȠȎȘȔȓ ȘȎȞȏȖȒȘȞȓȚțȖȓȐȜȗ ȘȓȞȎȚȖȘȖ. ǼȝȖȞȎȭȟȪ țȎ ȟȜȏȟȠȐȓțțȩȓ ȖȟȟșȓȒȜȐȎțȖȭ Ȗ șȖȠȓȞȎȠȡȞțȩȓ ȒȎțțȩȓ, țȎ ȘȜțȘȞȓȠțȩȣ ȝȞȖȚȓȞȎȣ ȎȐȠȜȞȩ ȞȎȟȟȚȎȠȞȖȐȎȬȠ ȒȓȢȓȘȠȜȜȏȞȎȕȜȐȎțȖȓ Ȑ SiC, ȞȜșȪ ȒȖȟșȜȘȎȤȖȗ Ȑ ȝȞȜȤȓȟȟȎȣ ȒȓȑȞȎȒȎȤȖȖ p-n ȝȓȞȓȣȜȒȜȐ Ȗ ȒȖȜȒȜȐ ȆȜȠȠȘȖ. ǵțȎȥȖȠȓșȪțȜȓ ȚȓȟȠȜ Ȑ ȚȜțȜȑȞȎȢȖȖ ȡȒȓșȓțȜ ȢȞȎȑȚȓțȠȎȚ ȠȓȣțȜșȜȑȖȖ ȘȎȞȏȖȒȘȞȓȚțȖȓȐȩȣ ȝȞȖȏȜȞțȩȣ ȟȠȞȡȘȠȡȞ: ȜȘȖȟșȓțȖȬ SiC Ȗ ȢȜȞȚȖȞȜȐȎțȖȬ ȜȚȖȥȓȟȘȖȣȖȏȎȞȪȓȞțȩȣȘȜțȠȎȘȠȜȐ. ǽȞȓȒȟȠȎȐșȓțȩȒȎțțȩȓȜȟȠȞȡȘȠȡȞȓȖȝȎȞȎȚȓȠȞȎȣ ȘȎȞȏȖȒȘȞȓȚțȖȓȐȩȣȚȖȘȞȜȐȜșțȜȐȩȣȒȖȜȒȜȐ, ȎȠȎȘȔȓȞȎȟȟȚȜȠȞȓțȩȞȎȕșȖȥțȩȓȜȏșȎȟȠȖ ȝȞȖȚȓțȓțȖȭ SiC Ȗ ȘȎȞȏȖȒȘȞȓȚțȖȓȐȜȗ ȘȓȞȎȚȖȘȖ.

ǺȜțȜȑȞȎȢȖȭ ȞȎȟȟȥȖȠȎțȎ țȎ ȦȖȞȜȘȖȗ ȘȞȡȑ ȟȝȓȤȖȎșȖȟȠȜȐ Ȑ ȜȏșȎȟȠȖ ȢȖȕȖȘȖ Ȗ ȠȓȣțȜșȜȑȖȖ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȩȣ ȚȎȠȓȞȎșȜȐ Ȗ ȝȞȖȏȜȞȜȐ, Ȏ ȠȎȘȔȓ ȟȠȡȒȓțȠȜȐ Ȗ ȎȟȝȖȞȎțȠȜȐ ȟȜȜȠȐȓȠȟȠȐȡȬȧȖȣ ȟȝȓȤȖȎșȪțȜȟȠȓȗ.

ȀȎȏș.: 46, Ȗș.: 173, ǯȖȏșȖȜȑȞ.: 4019 țȎȕȐ.

ǸțȖȑȎ ȐȩȣȜȒȖȠ Ȑ ȎȐȠȜȞȟȘȜȗ ȞȓȒȎȘȤȖȖ

DZșȎȐțȩȗ ȞȓȒȎȘȠȜȞ ȟȓȞȖȖ ȎȘȎȒȓȚȖȘ ǻǮǻ ȁȘȞȎȖțȩ DZȞȖțȓȐ ǯ.ǰ.

ǼȠȐ. ȟȓȘȞȓȠȎȞȪ ȘȎțȒ. ȢȖȕ.-ȚȎȠ. țȎȡȘ ȇȓȞȏȖțȎ dz.ǰ.

4.7.ȀȓȞȚȜțȎȝȞȭȔȓțȖȭ ȘȎȘ ȢȎȘȠȜȞ ȜȏȞȎȕȜȐȎțȖȭ ȒȓȢȓȘȠȜȐ

ȐȘȞȖȟȠȎșșȎȣ SiC ȝȞȖ ȞȜȟȠȓ Ȗȕ ȝȎȞȜȐȜȗ ȢȎȕȩ. ǾȎȟȝȞȓȒȓșȓțȖȓ

ȅǮǿȀȊ 4. ǺǶǸǾǼǰǼǹǻǼǰȉdz ǸǮǾǯǶDzǸǾdzǺǻǶdzǰȉdz DzǶǼDzȉ

ȅǮǿȀȊ 5. ȋǹdzǸȀǾǶȅdzǿǸǮȍ ǮǸȀǶǰǻǼǿȀȊ DzǶǿǹǼǸǮȄǶǷ

ǰSIC p-n ǽdzǾdzȃǼDzǮȃ Ƕ DzǶǼDzǮȃ ȆǼȀȀǸǶ

5.1.ȂȜȞȚȖȞȜȐȎțȖȓ p-i-n ȒȖȜȒțȩȣ ȟȠȞȡȘȠȡȞ Ȗ ȝȜșȡȥȓțȖȓ

ǽȞȓȒȖȟșȜȐȖȓ

ǰȝȜȟșȓȒțȖȓȒȓȟȭȠȖșȓȠȖȭțȎȚȓȠȖșȟȭȟȡȧȓȟȠȐȓțțȩȗȝȞȜȑȞȓȟȟȘȎȘ

ȐȠȓȣțȜșȜȑȖȖ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȜȑȜ SiC, ȠȎȘ Ȗ ȠȓȣțȜșȜȑȖȖ ȝȞȖȏȜȞȜȐ țȎ ȓȑȜ ȜȟțȜȐȓ. ǽȞȜȖȟȣȜȒȖȠ ȏȩȟȠȞȎȭ ȚȜȒȓȞțȖȕȎȤȖȭ ȠȓȣțȜșȜȑȖȖ ȐȩȞȎȧȖȐȎțȖȭȚȜțȜȘȞȖȟȠȎșșȜȐ, ȡȐȓșȖȥȓțȖȓȖȣȞȎȕȚȓȞȜȐȖȡșȡȥȦȓțȖȓ ȖȣȝȎȞȎȚȓȠȞȜȐ. ǾȎȕȞȎȏȎȠȩȐȎȬȠȟȭȠȓȣțȜșȜȑȖȥȓȟȘȖȓȚȓȠȜȒȩȖȕȑȜȠȜȐșȓțȖȭ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȩȣ ȝȞȖȏȜȞȜȐ Ȗ ȖȟȟșȓȒȡȬȠȟȭ Ȗȣ ȝȎȞȎȚȓȠȞȩ. ȋȠȖȚ ȐȜȝȞȜȟȎȚ ȝȜȟȐȭȧȓțȩ ȞȓȑȡșȭȞțȩȓ ȚȓȔȒȡțȎȞȜȒțȩȓ Ȗ dzȐȞȜ-

ȝȓȗȟȘȖȓ ȘȜțȢȓȞȓțȤȖȖ International Conference on Silicon Carbide and Related Materials (ICSCRM) Ȗ ECSCRM. ǼȒțȎȘȜ, țȓȟȚȜȠȞȭ țȎ țȎșȖȥȖȓȣȜȞȜȦȖȣȜȏȕȜȞȜȐȝȜȢȖȕȖȥȓȟȘȖȚ ȟȐȜȗȟȠȐȎȚ ȘȎȞȏȖȒȎȘȞȓȚțȖȭ Ȗ ȞȭȒȎ ȚȜțȜȑȞȎȢȖȗ, ȜȝȡȏșȖȘȜȐȎțțȩȣ Ȑ ȝȜȟșȓȒțȖȓ ȑȜȒȩ Ȑ ǿǻDZ Ȗ ȒȎșȪțȓȚ ȕȎȞȡȏȓȔȪȓ [1 11], ȝȜȟȐȭȧȓțțȩȣ ȜȠȒȓșȪțȩȚ ȝȞȜȏșȓȚȎȚ SiC Ȗ ȘȎȞȏȖȒȘȞȓȚțȖȓȐȜȗ ȫșȓȘȠȞȜțȖȘȖ, ȖȚȓȓȠȟȭ țȓȜȏȣȜȒȖȚȜȟȠȪ ȜȕțȎȘȜȚȖȠȪ ȟȝȓȤȖȎșȖȟȠȜȐ, ȟȠȡȒȓțȠȜȐ Ȗ ȎȟȝȖȞȎțȠȜȐ ȟ ȟȜȐȞȓȚȓțțȩȚȖ ȒȜȟȠȖȔȓțȖȭȚȖ Ȑ ȠȓȣțȜșȜȑȖȖ ȖȕȑȜȠȜȐșȓțȖȭ, ȘȎȘ ȟȎȚȜȑȜ ȚȎȠȓȞȖȎșȎ, ȠȎȘȖȞȎȕȞȎȏȜȠȜȘțȎȖȏȜșȓȓȝȓȞȟȝȓȘȠȖȐțȩȣȖȚȎșȜȜȟȐȓȧȓțțȩȣȐ șȖȠȓȞȎȠȡȞȓ ȘȎȞȏȖȒȘȞȓȚțȖȓȐȩȣ ȚȖȘȞȜȐȜșțȜȐȩȣ ȒȖȜȒȜȐ.

ǸȎȘ ȖȕȐȓȟȠțȜ, ȫȢȢȓȘȠȖȐțȜȟȠȪ ȞȎȒȖȜȫșȓȘȠȞȜțțȩȣ ȡȟȠȞȜȗȟȠȐ, ȜȟȜȏȓțțȜ ȞȎȏȜȠȎȬȧȖȣ Ȑ ȫȘȟȠȞȓȚȎșȪțȩȣ ȡȟșȜȐȖȭȣ (ȐȩȟȜȘȖȓ ȠȓȚȝȓȞȎȠȡȞȩ, ȎȑȞȓȟȟȖȐțȩȓ ȟȞȓȒȩ, ȞȎȒȖȎȤȖȭ), ȟȡȧȓȟȠȐȓțțȜ ȕȎȐȖȟȖȠ ȜȠ ȝȜȐȩȦȓțȖȭ ȏȩȟȠȞȜȒȓȗȟȠȐȖȭ, ȫțȓȞȑȜȟȏȓȞȓȔȓțȖȭ Ȗ țȎȒȓȔțȜȟȠȖ ȠȐȓȞȒȜȠȓșȪțȜȗ ȫșȓȚȓțȠțȜȗ ȏȎȕȩ, Ȑ ȠȜȚ ȥȖȟșȓ ȜȠ ȓȓ ȟȝȜȟȜȏțȜȟȠȖ ȒȜșȑȜȐȞȓȚȓțțȜȗ ȞȎȏȜȠȩ Ȑ ȔȓȟȠȘȖȣ ȡȟșȜȐȖȭȣ ȫȘȟȝșȡȎȠȎȤȖȖ. ǯȓȕ ȡȥȓȠȎ ȫȠȖȣȠȞȓȏȜȐȎțȖȗ, ȐȏșȖȔȎȗȦȓȚȏȡȒȡȧȓȚȝȞȜȒȡȘȤȖȭȚȜȔȓȠȜȘȎȕȎȠȪȟȭ țȓȐȜȟȠȞȓȏȜȐȎțțȜȗ. ǼȒțȖȚȖȕȚȎȠȓȞȖȎșȜȐ, țȎȜȟțȜȐȓȘȜȠȜȞȜȑȜȚȜȔțȜ ȐȩȝȡȟȘȎȠȪ ȫșȓȘȠȞȜțțȩȓ ȝȞȖȏȜȞȩ, ȟȜȜȠȐȓȠȟȠȐȡȬȧȖȓ ȟȠȜșȪ ȔȓȟȠȘȖȚ ȠȞȓȏȜȐȎțȖȭȚ, ȭȐșȭȓȠȟȭ ȘȎȞȏȖȒ ȘȞȓȚțȖȭ.

ǸȎȞȏȖȒ ȘȞȓȚțȖȭ ȟȡȧȓȟȠȐȡȓȠ Ȑ ȐȖȒȓ ȒȐȡȣ ȚȜȒȖȢȖȘȎȤȖȗ – ȘȡȏȖ- ȥȓȟȘȜȗC(3ǿ)-SiC ȖȑȓȘȟȎȑȜțȎșȪțȜȗB-SiC. ǸȡȏȖȥȓȟȘȖȗȘȎȞȏȖȒȘȞȓȚțȖȭ ȖȚȓȓȠȞȓȦȓȠȘȡȠȖȝȎȤȖțȘȜȐȜȗȜȏȚȎțȘȖ. ǰȚȜȒȖȢȖȘȎȤȖȖB-SiC ȜȏȨȓȒȖ-

țȭȓȠȟȭȏȜșȪȦȜȓȥȖȟșȜȟȣȜȒțȩȣȝȜȟȠȞȜȓțȖȬȟȠȞȡȘȠȡȞțȩȣȢȜȞȚ – ȝȜșȖȠȖȝȜȐ. ǸȜșȖȥȓȟȠȐȜȖȕȐȓȟȠțȩȣȝȜșȖȠȖȝȜȐSiC ȏȜșȓȓ200 Ȗ, ȝȜ-ȐȖȒȖȚȜȚȡ,

ȐȝȞȖțȤȖȝȓ, ȖȣȥȖȟșȜțȓȜȑȞȎțȖȥȓțȜ. ǽȜșȖȠȖȝȩSiC ȜȏșȎȒȎȬȠȞȎȕșȖȥțȩȚȖȢȖȕȖȥȓȟȘȖȚȖȟȐȜȗȟȠȐȎȚȖ. ǰȐȖȒȡȞȎȕșȖȥțȜȗȕȜțțȜȗȟȠȞȡȘȠȡȞȩ,

ȐȜȟțȜȐțȜȚ, ȕȜțȩ ȝȞȜȐȜȒȖȚȜȟȠȖ, ȝȜșȖȠȖȝȩ ȖȚȓȬȠ ȞȎȕțȡȬ ȐȓșȖȥȖțȡ ȦȖȞȖțȩȕȎȝȞȓȧȓțțȜȗȕȜțȩ(3C-SiC – 2.3 ȫǰ, 6ǻ – 3.02 ȫǰ, 4ǻ – 3.2 ȫǰ), ȞȎȕșȖȥțȩȥȖȟșȜȖȫțȓȞȑȖȭȢȜțȜțȜȐ, ȖȟȝȡȟȘȎȓȚȩȣȝȞȖțȓȝȞȭȚȩȣȝȓȞȓȣȜȒȎȣ. ǰȟȓ ȝȜșȖȠȖȝȩ ȭȐșȭȬȠȟȭ ȟȠȞȡȘȠȡȞȎȚȖ, ȝȜȟȠȞȜȓțțȩȚȖ Ȗȕ ȖȒȓțȠȖȥțȩȣȒȐȜȗțȩȣȟșȜȓȐȎȠȜȚȜȐSi ȖC. ǰȕȎȐȖȟȖȚȜȟȠȖȜȠȠȖȝȎȡȝȎȘȜȐȘȖ ȒȐȜȗțȩȣȟșȜȓȐȢȜȞȚȖȞȡȬȠȟȭȞȎȕșȖȥțȩȓȝȜșȖȠȖȝȩ SiC. DzșȭȜȝȖȟȎțȖȭ ȝȜșȖȠȖȝȜȐ ȖȟȝȜșȪȕȡȬȠȟȭ ȜȏȜȕțȎȥȓțȖȭ ǾȎȚȟȒȓșȎ, ȘȜȠȜȞȩȓ ȟȜȟȠȜȭȠ Ȗȕ ȤȖȢȞȩ, ȝȜȘȎȕȩȐȎȬȧȓȗ ȥȖȟșȜ ȟșȜȓȐ Ȑ ȝȓȞȖȜȒȓ ȝȜȐȠȜȞȭȓȚȜȟȠȖ, Ȗ ȏȡȘȐȩ ǻ, R ȖșȖ ǿ, Ȑ ȕȎȐȖȟȖȚȜȟȠȖ ȜȠ ȠȜȑȜ, ȭȐșȭȓȠȟȭ șȖ ȫșȓȚȓțȠȎȞțȎȭ ȞȓȦȓȠȘȎ ȑȓȘȟȎȑȜțȎșȪțȜȗ, ȞȜȚȏȜȫȒȞȖȥȓȟȘȜȗ ȖșȖ ȘȡȏȖȥȓȟȘȜȗ.

ǸȎȞȏȖȒ ȘȞȓȚțȖȭ ȜȏșȎȒȎȓȠ ȣȖȚȖȥȓȟȘȜȗ ȟȠȎȏȖșȪțȜȟȠȪȬ, ȐȩȟȜȘȜȗ ȟȠȜȗȘȜȟȠȪȬȘȝȜȐȩȦȓțțȩȚ ȠȓȚȝȓȞȎȠȡȞȎȚȖȖȜțȖȕȖȞȡȬȧȖȚȖȕșȡȥȓțȖȭȚ, ȐȜȕȚȜȔțȜȟȠȪȬ șȓȑȖȞȜȐȎțȖȭ ȓȑȜ ȎȘȤȓȝȠȜȞțȩȚȖ Ȗ ȒȜțȜȞțȩȚȖ ȝȞȖȚȓȟȭȚȖ. ǰȟȓ ȫȠȜ ȐȩȕȩȐȎȓȠ ȖțȠȓȞȓȟ Ș SiC ȞȎȕȞȎȏȜȠȥȖȘȜȐ ȫșȓȚȓțȠțȜȗ ȏȎȕȩ ȠȐȓȞȒȜȠȓșȪțȜȗ ȫșȓȘȠȞȜțȖȘȖ Ȑ ȞȭȒȓ ȐȓȒȡȧȖȣ ȟȠȞȎț ȚȖȞȎ. ǽȜșȡȝȞȜȐȜȒțȖȘȜȐȩȗ ȘȎȞȏȖȒ ȘȞȓȚțȖȭ – ȫȠȜ ȏȎȕȜȐȩȗ ȚȎȠȓȞȖȎș Ȓșȭ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȩȣ ȝȞȖȏȜȞȜȐ, ȝȞȓȒțȎȕțȎȥȓțțȩȣ Ȓșȭ ȞȎȏȜȠȩ Ȑ ȫȘȟȠȞȓȚȎșȪțȩȣȡȟșȜȐȖȭȣ: ȝȞȖȐȩȟȜȘȖȣȠȓȚȝȓȞȎȠȡȞȎȣȖȝșȜȠțȜȟȠȭȣȠȜȘȎ

ȐȡȟșȜȐȖȭȣȝȜȐȩȦȓțțȜȗȞȎȒȖȎȤȖȖȖȎȑȞȓȟȟȖȐțȩȣȟȞȓȒ. ȁțȖȘȎșȪțȩȓ ȢȖȕȖȥȓȟȘȖȓȟȐȜȗȟȠȐȎSiC ȐȟȓȦȖȞȓȖȟȝȜșȪȕȡȬȠȟȭȒșȭȝȞȜȖȕȐȜȒȟȠȐȎȝȜșȡȝȞȜȐȜȒțȖȘȜȐȩȣ ȝȞȖȏȜȞȜȐ Ȓșȭ ȫșȓȘȠȞȜțȖȘȖ Ȗ ȜȝȠȜȫșȓȘȠȞȜțȖȘȖ.

ǰțȎȟȠȜȭȧȓȓ ȐȞȓȚȭ ȜȟțȜȐțȜȗ ȜȏȨȓȚ ȞȎȏȜȠ Ȑ ȜȏșȎȟȠȖ ȚȎȠȓȞȖȎșȜȐȓȒȓțȖȭ SiC Ȗ ȝȞȖȏȜȞȜȐ țȎ ȫȠȜȚ ȚȎȠȓȞȖȎșȓ ȐȩȝȜșțȭȓȠȟȭ Ȑ ǿȆǮ.

ǰdzȐȞȜȝȓ ȎȘȠȖȐțȩȓ ȞȎȏȜȠȩ ȝȞȜȐȜȒȭȠȟȭ Ȑ DZȓȞȚȎțȖȖ, ȂȞȎțȤȖȖ, ȆȐȓȤȖȖ, ǾȜȟȟȖȖ, Ȑ ǮȕȖȖ șȖȒȓȞȜȚ ȭȐșȭȓȠȟȭ ȍȝȜțȖȭ.

ǰȠȎȏșȖȤȓ1 ȝȞȖȐȓȒȓțȩȎȚȓȞȖȘȎțȟȘȖȓ, ȓȐȞȜȝȓȗȟȘȖȓȖȭȝȜțȟȘȖȓ ȘȜȚȝȎțȖȖ, ȐȓȒȡȧȖe ȖȟȟșȓȒȜȐȎțȖȭȖȞȎȕȞȎȏȜȠȘȖȐȜȏșȎȟȠȖȚȎȠȓȞȖȎșȜȐȓȒȓțȖȭ SiC Ȗ ȝȞȖȏȜȞȜȐ țȎ ȓȑȜ ȜȟțȜȐȓ.

ǻȎȘȜțȢȓȞȓțȤȖȖECSCRM-2008 (ǯȎȞȟȓșȜțȎ, ǶȟȝȎțȖȭ) ȞȎȟȟȚȎȠȞȖȐȎșȖȟȪȒȎțțȩȓȜȑȜȒȖȥțȜȚȝȞȖȞȜȟȠȓSiC ȫșȓȚȓțȠțȜȗȏȎȕȩ, ȝȜȠȞȓȏ- țȜȟȠȖȐ4-ȣȖ6-ȖȒȬȗȚȜȐȩȣȝȜȒșȜȔȘȎȣSiC ȖȜȏȨȮȚȞȩțȘȎȝȜȒșȜȔȓȘ țȎ 2005–2015 ȑȑ., ȝȞȓȒȟȠȎȐșȓțțȩȓ țȎ ȞȖȟ. 1 Ȗ ȞȖȟ. 2, Ȗȕ ȘȜȠȜȞȩȣ ȐȖȒțȜ, ȥȠȜ țȎȥȖțȎȭ ȟ 2010 ȑ. ȝȞȜȑțȜȕȖȞȡȓȠȟȭ ȟȡȧȓȟȠȐȓțțȜȓ ȞȎȟȦȖȞȓțȖȓ ȞȩțȘȎ ȝȜȒșȜȔeȘ SiC Ȗ ȫșȓȚȓțȠțȜȗ ȏȎȕȩ țȎ ȜȟțȜȐȓ SiC.

10 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȀȎȏșȖȤȎ 1. ǸȜȚȝȎțȖȖ, ȐȓȒȡȧȖȓ ȖȟȟșȓȒȜȐȎȠȓșȪȟȘȖȓ ȞȎȏȜȠȩ Ȑ ȜȏșȎȟȠȖ SiC [11]

ǾȖȟ. 1. DZȜȒȖȥțȩȗ ȝȞȖȞȜȟȠ ȝȞȜȤȓțȠțȜȑȜ ȟȜȜȠțȜȦȓțȖȭ ȞȩțȘȎ SiC ȫșȓȚȓțȠțȜȗ ȏȎȕȩ Ș ȜȏȧȓȚȡ ȥȖȟșȡ Si ȒȖȟȘȞȓȠțȩȣ ȟȖșȜȐȩȣ ȝȞȖȏȜȞȜȐ

ǻȎȖȏȜșȓȓ ȡȟȝȓȦțȜȗ Ȑ ȞȎȕȐȖȠȖȖ ȘȎȞȏȖȒȘȞȓȚțȖȓȐȜȗ ȖțȒȡȟȠȞȖȖ ȟȥȖȠȎȓȠȟȭ ȘȜȚȝȎțȖȭ Cree (ǿȆǮ). ǼȠȚȓȠȖȚ ȞȭȒ ȓȓ ȒȜȟȠȖȔȓțȖȗ [12]: x ȟȖșȜȐȎȭ ȫșȓȘȠȞȜțȖȘȎ – ȠȞȎțȕȖȟȠȜȞȩ Cree ȟ țȎȝȞȭȔȓțȖȓȚ ȝȞȜȏȜȭ ȏȜșȓȓ 13 Șǰ; SiC ȟȖșȜȐȩȓ ȚȜȒȡșȖ, ȟȝȜȟȜȏțȩȓ ȘȜȚȚȡȠȖȞȜȐȎȠȪ

ȠȜȘȖ ȒȜ 600 Ǯ;

x ǿǰȅ-ȠȓȣțȖȘȎ– ȝȜșȓȐȩȓȠȞȎțȕȖȟȠȜȞȩ țȎȝȜȒșȜȔȘȎȣȢȖȞȚȩ Cree, ȟ ȚȎȘȟȖȚȎșȪțȜȗ ȥȎȟȠȜȠȜȗ ȒȜ 40 DZDZȤ Ȗ ȝȞȜȏȖȐțȩȚ țȎȝȞȭȔȓțȖȓȚ 120 ǰ;

x ǿȓțȟȜȞȩ – ȐȩȟȜȘȜȠȓȚȝȓȞȎȠȡȞțȩȓ (ȒȜ 600 °ǿ), ȞȎȒȖȎȤȖ-

ȜțțȜȟȠȜȗȘȖȓ (ȟ ȒȜȝȡȟȠȖȚȩȚ ȡȞȜȐțȓȚ ȜȏșȡȥȓțȖȭ țȓȗȠȞȜțȜȐ ȏȜșȓȓ 5¸1015 ț/ȟȚ2);

x ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȩȓ ȝȞȓȜȏȞȎȕȜȐȎȠȓșȖ ȠȓȚȝȓȞȎȠȡȞȩ, ȒȎȐșȓțȖȭ(ȒȜ 1600 ȘǽȎ), ȝȜȠȜȘȎ, ȐȖȏȞȎȤȖȖ, ȐȠȜȚȥȖȟșȓȖȒșȭȫȘȟȠȞȓȚȎșȪțȩȣ ȡȟșȜȐȖȗ ȫȘȟȝșȡȎȠȎȤȖȖ.

ǰ ǾȜȟȟȖȖ țȎȖȏȜșȪȦȖȓ ȡȟȝȓȣȖ Ȑ ȠȓȣțȜșȜȑȖȖ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ Ȗ ȝȞȖȏȜȞȜȐ țȎ ȓȑȜ ȜȟțȜȐȓ Ȑ ȝȜȟșȓȒțȖȓ ȑȜȒȩ, ȘȎȘ ȟȜȏȟȠȐȓțțȜ, Ȗ ȐȜ Ȑȟȓ ȝȞȓȒȩȒȡȧȖȓ ȐȞȓȚȓțȎ, ȝȞȖțȎȒșȓȔȎȠ ȡȥȓțȩȚ Ȗ ȖțȔȓțȓȞȎȚ ȂȀǶ

ǾȖȟ. 2. ǽȜȠȞȓȏțȜȟȠȪ 4-ȣ Ȗ 6-Ȗ ȒȬȗȚȜȐȩȣ SiC ȝȜȒșȜȔȓȘ Ȓșȭ SiC ȟȖșȜȐȩȣ ȝȞȖȏȜȞȜȐ

12 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȖȚ. Ǯ.Ȃ. ǶȜȢȢȓ ǾǮǻ [11, 13–21] Ȗ ǹȋȀǶ ȖȚ. ǰ.Ƕ. ȁșȪȭțȜȐȎ-ǹȓțȖțȎ, țȩțȓ ǿȎțȘȠ-ǽȓȠȓȞȏȡȞȑȟȘȜȑȜ DZȜȟȡȒȎȞȟȠȐȓțțȜȑȜ ȫșȓȘȠȞȜȠȓȣțȖȥȓȟȘȜȑȜ ȁțȖȐȓȞȟȖȠȓȠȎ «ǹȋȀǶ» [22–29]. ǼȠȚȓȠȖȚ ȠȜșȪȘȜ țȓȘȜȠȜȞȩȓ Ȗȕ țȖȣ.

ǰȜ ȂȀǶ ȖȚ. Ǯ.Ȃ. ǶȜȢȢȓ ǾǮǻ:

x ȟȜȐȚȓȟȠțȜ ȟ ǮǼǵȀ «ǿȐȓȠșȎțȎ» Ȗ DZǽ ǻǶǶ «ǼȞȖȜț» ȟȜȕȒȎț șȎȐȖțțȜ-ȝȞȜșȓȠțȩȗ ȒȖȜȒ țȎ ȜȟțȜȐȓ SiC p+-n-n+ ȟȠȞȡȘȠȡȞȩ;

x ȟȜȐȚȓȟȠțȜ ȟ ǮǼǵȀ «ǿȐȓȠșȎțȎ» Ȗ DZǽ ǻǶǶ «ǼȞȖȜț» ȟȜȕȒȎțȩ SiC ȚȖȘȞȜȐȜșțȜȐȩȓp-i-n ȒȖȜȒȩ3-ȣȟȎțȠȖȚȓȠȞȜȐȜȑȜȒȖȎȝȎȕȜțȎȒșȖț ȐȜșț ȟ ȖȚȝȡșȪȟțȜȗ ȐȣȜȒțȜȗ ȚȜȧțȜȟȠȪȬ 1÷2 ȘǰȠ;

x ȟȜȕȒȎțȩ Ȗ ȖȟȟșȓȒȜȐȎțȩ p-n ȑȓȠȓȞȜȝȓȞȓȣȜȒȩ 3ǿ-6H-SiC, Ȗ ȝȜȘȎȕȎțȎ ȐȜȕȚȜȔțȜȟȠȪ ȟȜȕȒȎțȖȭ țȎ Ȗȣ ȜȟțȜȐȓ ǻdzǺȀ.

ǰ ǿǽDZȋȀȁ «ǹȋȀǶ»:

x ȐȝȓȞȐȩȓȫȘȟȝȓȞȖȚȓțȠȎșȪțȜȝȜȘȎȕȎțȎȐȜȕȚȜȔțȜȟȠȪȟȜȕȒȎțȖȭ ȢȜȠȜȝȞȖȓȚțȩȣ ȡȟȠȞȜȗȟȠȐ ȡșȪȠȞȎȢȖȜșȓȠȜȐȜȑȜ ȒȖȎȝȎȕȜțȎ țȎ ȜȟțȜȐȓ țȎțȜȝȜȞȖȟȠȜȑȜ SiC;

x ȜȟȐȜȓț ȫȘȟȝȓȞȖȚȓțȠȎșȪțȩȗ ȐȩȝȡȟȘ 6ǻ Ȗ 4H-SiC ȝȜȒșȜȔȓȘ ȒȖȎȚȓȠȞȜȚ 2–3aa (50÷75 ȚȚ);

x ȜȏțȎȞȡȔȓț Ȗ ȖȟȟșȓȒȜȐȎț ȡȟȠȜȗȥȖȐȩȗ, ȜȏȞȎȠȖȚȩȗ ȞȜȟȠȜȐȩȗ ȟȠȞȡȘȠȡȞțȩȗ ȖȕȜȚȜȞȢȖȕȚ Ȑ ȟȖȟȠȓȚȓ SiC-AlN.

ǿ ȟȜȔȎșȓțȖȓȚ ȝȞȖȣȜȒȖȠȟȭ ȘȜțȟȠȎȠȖȞȜȐȎȠȪ, ȥȠȜ Ȑ 90-ȓ ȑȜȒȩ țȎȡȥțȩȗ ȝȜȠȓțȤȖȎș Ȑ ȜȏșȎȟȠȖ ȚȎȠȓȞȖȎșȜȐȓȒȓțȖȭ SiC Ȗ ȝȞȖȏȜȞȜȐ țȎ ȓȑȜ ȜȟțȜȐȓ ȜȘȎȕȎșȟȭ ȐȜȟȠȞȓȏȜȐȎțțȩȚ, Ȑ ȜȟțȜȐțȜȚ, țȎ ǵȎȝȎȒȓ. ȀȎȘ ȝȜ ȒȎțțȩȚ [11] Ȑ ȘȜȚȝȎțȖȖ Cree Ȑ țȎȥȎșȓ 90-ȣ ȑȜȒȜȐ ȝȜȥȠȖ ȝȜșȜȐȖțȎ țȎȡȥțȩȣ ȟȜȠȞȡȒțȖȘȜȐ ȏȩșȎ ȐȩȣȜȒȤȎȚȖ Ȗȕ ǿǿǿǾ, ȥȠȜ ȐȜ ȚțȜȑȜȚ ȟȝȜȟȜȏȟȠȐȜȐȎșȜ, țȎȝȞȖȚȓȞ, ȐȩȟȜȘȜȫȢȢȓȘȠȖȐțȜȗ ȞȎȕȞȎȏȜȠȘȓ ȚȜȧțȩȣ ȏȖȝȜșȭȞțȩȣ ȝȞȖȏȜȞȜȐ țȎ ȜȟțȜȐȓ SiC [18]. B University of South Carolina (ǿȆǮ) ȡȟȝȓȦțȜ ȞȎȕȐȖȐȎșȖ ȠȓȣțȜșȜȑȖȬ SiC, ȞȎȕȞȎȏȜȠȘȡȘȎȞȏȖȒȘȞȓȚțȖȓȐȩȣp-i-n ȒȖȜȒȜȐȖȖȕȡȥȓțȖȓȚȓȣȎțȖȕȚȜȐ Ȗȣ ȒȓȑȞȎȒȎȤȖȖ ȟȜȠȞȡȒțȖȘȖ ȀȓȣțȜșȜȑȖȥȓȟȘȜȑȜ ǶțȟȠȖȠȡȠȎ ȌȔțȜȑȜ ȂȓȒȓȞȎșȪțȜȑȜ ȁțȖȐȓȞȟȖȠȓȠȎ (ȑ. ȀȎȑȎțȞȜȑ, ǾȜȟȟȖȭ) [30–34]. ȅȎȟȠȪ ȫȠȖȣ ȖȟȟșȓȒȜȐȎțȖȗ ȐȜȦșȎ Ȑ ȒȎțțȡȬ ȚȜțȜȑȞȎȢȖȬ

ȁȘȎȕȎțțȜȚȡ ȢȎȘȠȜȞȡ (ȜȠȠȜȘȡ țȎȡȥțȩȣ ȘȎȒȞȜȐ) ȟȝȜȟȜȏȟȠȐȜȐȎșȜ ȜȏȧȓȖȕȐȓȟȠțȜȓ ȟȘȡȒțȜȓ ȢȖțȎțȟȖȞȜȐȎțȖȓ țȎȡȥțȩȣ ȖȟȟșȓȒȜȐȎțȖȗ Ȗ ȞȎȕȞȎȏȜȠȜȘ, ȥȠȜ Ȑ țȎȥȎșȓ 90-ȣ ȑȜȒȜȐ țȓ ȠȜșȪȘȜ ȜȏȓȟȘȞȜȐȖșȜ țȎȦȖ țȎȡȥțȩȓ ȤȓțȠȞȩ, țȜ Ȑ ȝȜȟșȓȒȡȬȧȓȓ ȒȓȟȭȠȖșȓȠȖȓ ȝȞȖȐȓșȜ Ș ȡȠȞȎȠȓ ȚțȜȑȖȣ ȝȓȞȓȒȜȐȩȣ ȝȜȕȖȤȖȗ, Ȑ ȠȜȚ ȥȖȟșȓ ȡȠȞȎȠȓ ǾȜȟȟȖȓȗ șȖȒȓȞȟȠȐȎ ȐȜȏșȎȟȠȖSiC ȚȎȠȓȞȖȎșȜȐȓȒȓțȖȭ. ǼȝȩȠȫȠȜȑȜȟȜȠȞȡȒțȖȥȓȟȠȐȎ ȠȎȘȔȓ ȝȜȘȎȕȎș, ȥȠȜ ȝȞȖ țȎșȖȥȖȖ ȐȩȟȜȘȜȘȐȎșȖȢȖȤȖȞȜȐȎțțȩȣ țȎȡȥțȩȣ Ȗ

ȖțȔȓțȓȞțȩȣȘȎȒȞȜȐ, ȐȩȟȜȘȜȠȓȣțȜșȜȑȖȥțȜȑȜȜȏȜȞȡȒȜȐȎțȖȭ(ȎȝȞȜȖȕȐȜȒȟȠȐȜ SiC Ȗ ȝȞȖȏȜȞȜȐ țȎ ȓȑȜ ȜȟțȜȐȓ ȐȜ ȐȟȓȚ ȚȖȞȓ ȜȠțȜȟȖȠȟȭ Ș ȐȩȟȜȘȖȚ ȠȓȣțȜșȜȑȖȭȚ), ȟȜȜȠȐȓȠȟȠȐȡȬȧȓȗ ȖțȢȞȎȟȠȞȡȘȠȡȞȩ ȐȜȕȚȜȔȓț ȘȎȥȓȟȠȐȓțțȩȗ ȟȘȎȥȓȘ, ȘȜȠȜȞȩȗ Ȗ ȝȞȜȖȕȜȦȓș ȜȥȓțȪ ȏȩȟȠȞȜ, Ȑ ȠȎȘȜȗ ȒȜșȑȜȓ ȐȞȓȚȭ ȜȟȠȎȐȎȐȦȓȗȟȭ ȠȜșȪȘȜ șȖȦȪ ȝȓȞȟȝȓȘȠȖȐțȜȗ ȜȏșȎȟȠȖ. ǰȩȐȜȒ: ȝȞȜȑȞȓȟȟ ȒȜȞȜȑȜ ȟȠȜȖȠ. ǻȜ Ȝț ȜȝȞȎȐȒȎț.

ǰȐȖȒȡ ȜȏȧȖȣ ȢȖțȎțȟȜȐȩȣ Ȗ ȘȎȒȞȜȐȩȣ ȠȞȡȒțȜȟȠȓȗ Ȑ ȁȘȞȎȖțȓ, ȘȎȘ Ȗ Ȑ ǾȜȟȟȖȖ, țȓ ȡȒȎșȜȟȪ ȡȒȓȞȔȎȠȪ ȏȜșȪȦȡȬ ȥȎȟȠȪ ȞȎȕȞȎȏȜȠȜȘ Ȗ ȖȟȟșȓȒȜȐȎțȖȗȝȜSiC. ȀȓȚțȓȚȓțȓȓȐǶțȟȠȖȠȡȠȓȢȖȕȖȘȖȝȜșȡȝȞȜȐȜȒțȖȘȜȐ (ǶȂǽ) ȖȚ. ǰ.dz. ǹȎȦȘȎȞȓȐȎǻǮǻȁ, ȜȘȎȕȎșȜȟȪȐȜȕȚȜȔțȩȚȝȜșȡȥȖȠȪțȜȐȩȓȜȞȖȑȖțȎșȪțȩȓȞȓȕȡșȪȠȎȠȩȝȜȞȎȕȞȎȏȜȠȘȓȖȖȟȟșȓȒȜȐȎțȖȬȏȖȜȚȜȞȢțȜȗȘȓȞȎȚȖȘȖțȎȜȟțȜȐȓSiC [35–38], ȞȎȕȞȎȏȜȠȘȓ țȜȐȜȗ ȠȓȣțȜșȜȑȖȖȟȜȕȒȎțȖȭțȎțȜȟȠȞȡȘȠȡȞțȩȣțȓȜȒțȜȞȜȒțȜȟȠȓȗțȎ ȝȜȐȓȞȣțȜȟȠȖ 6H-SiC, ȜȏțȎȞȡȔȓțȖȬ Ȗ ȖȟȟșȓȒȜȐȎțȖȬ ȐȩȟȜȘȜȫȢȢȓȘȠȖȐțȜȗ ȢȜȠȜșȬȚȖțȓȟȤȓțȤȖȖȐȝȜȒȜȏțȩȣȟȠȞȡȘȠȡȞȎȣ[39–41], Ȏ Ȑ ȘȜȜȝȓȞȎȤȖȖ ȟ DZǽ ǻǶǶ «ǼȞȖȜț» – ȞȎȕȞȎȏȜȠȎȠȪ ȏȎȕȜȐȩȓ ȠȓȣțȜșȜȑȖȖ ȜȚȖȥȓȟȘȖȣ Ȗ ȏȎȞȪȓȞțȩȣ ȘȜțȠȎȘȠȜȐ ȟ ȒȖȢȢȡȕȖȜțțȩȚȖ ȏȎȞȪȓȞȎȚȖ țȎ ȜȟțȜȐȓ ȎȚȜȞȢțȩȣȢȎȕȐțȓȒȞȓțȖȭ– ȏȜȞȖȒȜȐȖțȖȠȞȖȒȜȐȠȖȠȎțȎȖȤȖȞȘȜțȖȭ Ș ȘȎȞȏȖȒȡȘȞȓȚțȖȭ[42],ȎȠȎȘȔȓȏȓȟȘȜȞȝȡȟțȩȓ ȏȩȟȠȞȜȒȓȗȟȠȐȡȬȧȖȓ ȐȩȟȜȘȜȐȜșȪȠțȩȓ 4H-SiC p-i-n ȒȖȜȒȩ. ǰ ȞȎȚȘȎȣ ȒȜȑȜȐȜȞȎ Ȝ ȟȜȐȚȓȟȠțȜȚ ȟȜȠȞȡȒțȖȥȓȟȠȐȓ ȚȓȔȒȡ ǶȂǽ ȖȚ. ǰ.dz. ǹȎȦȘȎȞȓȐȎ ǻǮǻȁ Ȗ ȀȓȣțȜșȜȑȖȥȓȟȘȖȚȖțȟȠȖȠȡȠȜȚȌȔțȜȑȜȂȓȒȓȞȎșȪțȜȑȜȁțȖȐȓȞȟȖȠȓȠȎ ȐȝȜȟșȓȒțȖȓ ȑȜȒȩȏȩșȐȩȝȜșțȓț ȤȖȘșȢȖȕȖȘȜ-ȠȓȣțȜșȜȑȖȥȓȟȘȖȣ ȖȟȟșȓȒȜȐȎțȖȗ ȝȜ ȟȜȕȒȎțȖȬ Ȗ ȟȐȜȗȟȠȐȎȚ ȜȘȟȖȒțȩȣ ȝșȓțȜȘ ȑȎȒȜșȖțȖȭ, ȠȖȠȎțȎ Ȗ ȫȞȏȖȭ țȎ ȝȜȐȓȞȣțȜȟȠȖ n-6H-SiC [45–47].

ǻȓșȪȕȭțȓȜȠȚȓȠȖȠȪ, ȥȠȜȐȝȜȟșȓȒțȖȓȑȜȒȩȖțȠȓțȟȖȐțȓȗȦȖȚ ȜȏȞȎȕȜȚȞȎȕȐȖȐȎȬȠȟȭȞȎȏȜȠȩȝȜȚȎȠȓȞȖȎșȜȐȓȒȓțȖȬȎșȚȎȕȎȖțȖȠȞȖȒȎ ȑȎșșȖȭ, ȎȠȎȘȔȓȞȎȕȞȎȏȜȠȘȎȚȒȖȟȘȞȓȠțȩȣȝȞȖȏȜȞȜȐȖȖțȠȓȑȞȎșȪțȩȣ ȟȣȓȚ țȎ Ȗȣ ȜȟțȜȐȓ – ȭȐțȩȣ ȘȜțȘȡȞȓțȠȜȐ ȘȎȞȏȖȒȡ ȘȞȓȚțȖȭ. ǻȜ ȐȠȓȣțȜșȜȑȖȖ ȎșȚȎȕȎ Ȗ GaN ȒȜ ȟȖȣ ȝȜȞ ȟȡȧȓȟȠȐȡȓȠ ȞȭȒ ȠȓȣțȜșȜȑȖȥȓȟȘȖȣ ȝȞȜȏșȓȚ, ȘȜȠȜȞȩȣ țȓ ȏȩșȜ Ȑ ȠȓȣțȜșȜȑȖȖ SiC. ǽȜȫȠȜȚȡ, ȘȎȘ ȜȠȚȓȥȎȓȠȟȭ Ȑ [11] ȚȜȔțȜ ȜȔȖȒȎȠȪ, ȥȠȜ Ȑ XXI ȟȠȜșȓȠȖȖ SiC ȕȎȗȚȓȠ ȒȎȐțȜ ȜȔȖȒȎȓȚȜȓ ȚȓȟȠȜ Ȑ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȜȗ ȫșȓȘȠȞȜțȖȘȓ, ȝȜȟȘȜșȪȘȡ ȡȔȓȐțȎȟȠȜȭȧȓȓ ȐȞȓȚȭțȎȓȑȜȜȟțȜȐȓȞȎȕȞȎȏȜȠȎțȩ ȝȞȎȘȠȖȥȓȟȘȖ Ȑȟȓ ȠȖȝȩȝȜșȡȝȞȜȐȜȒțȖȘȜȐȩȣȝȞȖȏȜȞȜȐ. ǼȒțȎȘȜȫȠȜȟȠȎțȓȠȐȜȕȚȜȔțȩȚ ȠȜșȪȘȜȝȞȖȐȩȣȜȒȓSiC ȠȓȣțȜșȜȑȖȗțȎȟȜȐȞȓȚȓțțȩȗȡȞȜȐȓțȪ, ȥȠȜȒșȭ ǾȜȟȟȖȖȖȁȘȞȎȖțȩȘȎȟȎȓȠȟȭțȓȠȜșȪȘȜSiC ȠȓȣțȜșȜȑȖȗ, țȜȠȓȣțȜșȜȑȖȗ ȫșȓȘȠȞȜțțȜȗ ȝȞȜȚȩȦșȓțțȜȟȠȖ Ȑ ȤȓșȜȚ.

14ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ǰțȎȦȓȗ ȚȜțȜȑȞȎȢȖȖ ȞȎȟȟȚȜȠȞȓțȩ ȚȓȠȜȒȩ ȝȜșȡȥȓțȖȭ SiC Ȗ ȫȝȖȠȎȘȟȖȎșȪțȩȣ ȟȠȞȡȘȠȡȞ țȎȓȑȜȜȟțȜȐȓ, ȠȓȣțȜșȜȑȖȭ ȟȜȕȒȎțȖȭ ȕȎȧȖȠțȩȣ ȒȖȫșȓȘȠȞȖȥȓȟȘȖȣ ȟșȜȓȐ țȎ SiC, ȜȝȖȟȎțȩ ȚȓȠȜȒȩ ȖȕȑȜȠȜȐșȓțȖȭ Ȗ ȟȐȜȗȟȠȐȎ ȜȚȖȥȓȟȘȖȣ Ȗ ȏȎȞȪȓȞțȩȣ ȘȜțȠȎȘȠȜȐ Ș SiC Ȗ ȝȎȞȎȚȓȠȞȩ țȓȘȜȠȜȞȩȣ ȠȖȝȜȐ ȘȎȞȏȖȒȘȞȓȚțȖȓȐȩȣ ȚȖȘȞȜȐȜșțȜȐȩȣ ȒȖȜȒȜȐ. ǽȞȖȐȓȒȓț ȠȎȘȔȓ ȜȏȕȜȞȟȜȐȞȓȚȓțțȩȣȝȞȓȒȟȠȎȐșȓțȖȗȜ ȝȎȞȎȚȓȠȞȎȣȖȟȐȜȗȟȠȐȎȣȝȞȖȚȓȟȓȗ

ȖȒȓȢȓȘȠȜȐ Ȑ SiC. ǺȜțȜȑȞȎȢȖȭ ȟȜȟȠȜȖȠ Ȗȕ ȝȭȠȖ ȥȎȟȠȓȗ, ȝȞȓȒȖȟșȜȐȖȭ

ȖȕȎȘșȬȥȓțȖȭ. ǽȓȞȐȎȭ ȥȎȟȠȪ țȎȝȖȟȎțȎ Ǯ.dz. ǯȓșȭȓȐȩȚ, ǰ.ǿ. ǸȖȟȓșȓȐȩȚ, Dz.Ƕ. ȅȓȞȓȒțȖȥȓțȘȜ, Ǯ.Ǯ. ǹȓȏȓȒȓȐȩȚ Ȗ Ǽ.Ǯ. ǮȑȓȓȐȩȚ, Ȑ ȠȜȚ ȥȖȟșȓ ȑșȎȐȩ 1, 5 7, 9 țȎȝȖȟȎțȩ Ǯ.dz. ǯȓșȭȓȐȩȚ Ȗ ǰ.ǿ. ǸȖȟȓșȓȐȩȚ, ȑșȎȐȩ 2 4 – Dz.Ƕ. ȅȓȞȓȒțȖȥȓțȘȜ, ȑșȎȐȎ 8 ȝ. 8.1 8.4 Ȗ 8.6 țȎȝȖȟȎțȩ Ǯ.Ǯ. ǹȓȏȓȒȓȐȩȚ, ȝ. 8.5 – Ǽ.Ǯ. ǮȑȓȓȐȩȚ; ȐȠȜȞȎȭ ȥȎȟȠȪ – Ǯ.Ǻ. ǿȐȓȠșȖȥțȩȚ, Ǽ.ǯ. ǼȣȞȖȚȓțȘȜȖǰ.ǰ. ǽȜșȭȘȜȐȩȚ; ȠȞȓȠȪȭȥȎȟȠȪ– Ǽ.Ǯ. ǮȑȓȓȐȩȚ, ǻ.ǿ. ǯȜșȠȜȐȤȜȚ, Ǿ.ǰ. ǸȜțȎȘȜȐȜȗȖǰ.ǰ. ǺȖșȓțȖțȩȚ; ȥȓȠȐȓȞȠȎȭȥȎȟȠȪ – ǻ.ǿ. ǯȜșȠȜȐȤȜȚ Ȗ Ǿ.ǰ. ǸȜțȎȘȜȐȜȗ; ȝȭȠȎȭ ȥȎȟȠȪ – Dz.Ƕ. ȅȓȞȓȒțȖȥȓțȘȜ. ǽȞȓȒȖȟșȜȐȖȓȖȕȎȘșȬȥȓțȖȓțȎȝȖȟȎțȜǮ.dz. ǯȓșȭȓȐȩȚ, Ǿ.ǰ. ǸȜțȎȘȜȐȜȗ

ȖǮ.Ǯ. ǹȓȏȓȒȓȐȩȚ.

ǮȐȠȜȞȩ ȐȩȞȎȔȎȬȠ ȏșȎȑȜȒȎȞțȜȟȠȪ ȟȜȠȞȡȒțȖȘȎȚ ȘȜșșȓȘȠȖȐȜȐ, Ȑ ȘȜȠȜȞȩȣ ȞȎȏȜȠȎȬȠ, ȘȜȠȜȞȩȓ ȟȐȜȖȚ ȡȥȎȟȠȖȓȚ Ȑ ȞȎȏȜȠȎȣ Ȗ Ȗȣ ȜȏȟȡȔȒȓțȖȓȚ ȟȝȜȟȜȏȟȠȐȜȐȎșȖ ȞȎȟȦȖȞȓțȖȬ țȎȦȖȣ ȕțȎțȖȗ Ȝ ȘȎȞȏȖȒȓ ȘȞȓȚțȖȭ, Ȑ ȠȜȚ ȥȖȟșȓ:

ȟȜȠȞȡȒțȖȘȎȚ ȂȀǶ ȖȚ. Ǯ.Ȃ. ǶȜȢȢȓ ǾǮǻ ǽ.ǹ. ǮȏȞȎȚȜȐȡ, ǻ.ǰ. ǮȑȞȖțȟȘȜȗ, dz.ǰ. ǯȜȑȒȎțȜȐȜȗ, Dz.ǰ. DzȎȐȩȒȜȐȡ, ǿ.Ȍ. DzȎȐȩȒȜȐȡ, ǿ.ǽ. ǹȓȏȓȒȓȐȡ, ǻ.ǿ. ǿȎȐȘȖțȜȗ, ǹ.Ǻ. ǿȜȞȜȘȖțȡ, Ǯ.Ǻ. ǿȠȞȓșȪȥȡȘȡ, Ǯ.ǿ. ȀȞȓȑȡȏȜȐȜȗ, Ǻ.ǽ. ȇȓȑșȜȐȡ;

ȟȜȠȞȡȒțȖȘȎȚȀȓȣțȜșȜȑȖȥȓȟȘȜȑȜǶțȟȠȖȠȡȠȎȌȔțȜȑȜȂȓȒȓȞȎșȪțȜȑȜ ȁțȖȐȓȞȟȖȠȓȠȎ: ǯ.DZ. ǸȜțȜȝșȓȐȡ, ǹ.Ǻ. ǸȜȥȓȞȜȐȡ, Dz.Ǯ. ǿȓȥȓțȜȐȡ; ȟȜȠȞȡȒțȖȘȎȚ DZȜȟȡȒȎȞȟȠȐȓțțȜȑȜ ȝȞȓȒȝȞȖȭȠȖȭ ǻǶǶ «ǼȞȖȜț» ǰ.ǻ. ǶȐȎțȜȐȡ, ǰ.ǰ. ǯȎȟȎțȤȡ, Ȁ.ǰ. ǸȜȞȜȟȠȖțȟȘȜȗ, DZ. ǰȓȞȖȚȓȗȥȓțȘȜ; ȟȜȠȞȡȒțȖȘȎȚǶțȟȠȖȠȡȠȎȢȖȕȖȘȖȝȜșȡȝȞȜȐȜȒțȖȘȜȐȖȚ. ǰ.dz. ǹȎȦȘȎȞȓȐȎ ǻǮǻ ȁȘȞȎȖțȩ ǿ.ǰ. ǿȐȓȥțȖȘȜȐȡ, ǽ.Ƕ. ǯȎȞȎțȟȘȜȚȡ, Ǻ.ȍ. ǰȎșȎȣȡ, dz.Ȃ. ǰȓțȑȓȞȡ, ǰ.ǿ. ǹȩȟȓțȘȜ, dz.ǻ. ǸȎșȎȏȡȣȜȐȜȗ, ǿ.Ƕ. ǰșȎȟȘȖțȜȗ, ȍ.ȍ. ǸȡȒȞȖȘȡ, ǰ.Ǯ. ȆȖțȘȎȞȓțȘȜ, ǽ.Ǻ. ǹȖȠȐȖțȡ, Ǽ.ǿ. ǹȖȠȐȖț, ǻ.ǹ. DzȚȖȠȞȡȘȡ, Ǽ.ǿ. ǸȜțȒȞȎȠȓțȘȜ, ǹ.Ǻ. ǸȎȝȖȠȎțȥȡȘȡ, Ȍ.Ȍ. ǯȎȥȓ-

ȞȖȘȜȐȡ, ǻ.Ǯ. ǸȜșȚȎȘȜȐȜȗ.

ǮȐȠȜȞȩȐȩȞȎȔȎȬȠȖȟȘȞȓțțȬȬȝȞȖȕțȎȠȓșȪțȜȟȠȪȖȏșȎȑȜȒȎȞțȜȟȠȪ DzȖȞȓȘȠȜȞȡȤȓțȠȞȎȚȖȘȞȜȠȓȣțȜșȜȑȖȖȖȒȖȎȑțȜȟȠȖȘȖǿǽDZȋȁ«ǹȋȀǶ» ǹȡȥȖțȖțȡǰȖȘȠȜȞȡǰȖȘȠȜȞȜȐȖȥȡȕȎȜȏȟȡȔȒȓțȖȓȟȜȒȓȞȔȎțȖȭȒȎțțȜȗ

ȚȜțȜȑȞȎȢȖȖ, ȐȜ ȚțȜȑȜȚ ȖțȖȤȖȖȞȡȓȚȜȗ ȖȚ Ȗ ȟȝȜȟȜȏȟȠȐȜȐȎȐȦȓȚ ȓȓ ȝȜȭȐșȓțȖȬ.

ǺȎȠȓȞȖȎșȚȜțȜȑȞȎȢȖȖȐȜȚțȜȑȜȚȜȟțȜȐȎțțȎȜȝȩȠȓȖȖțȠȓȞȓȟȎȣ ȎȐȠȜȞȜȐ, Ȏ ȠȎȘȔȓ ȜȏȜȏȧȓțȖȖ ȖȟȟșȓȒȜȐȎțȖȗ ȝȜȟșȓȒțȖȣ șȓȠ, ȐȩȝȜșțȓțțȩȣ Ȑ ȐȓȒȡȧȖȣ ȕȎȞȡȏȓȔțȩȣ țȎȡȥțȩȣ ȤȓțȠȞȎȣ.

ǺȜțȜȑȞȎȢȖȭ ȝȜȒȑȜȠȜȐșȓțȎ ȝȞȖ ȝȜȒȒȓȞȔȘȓ DZȜȟȡȒȎȞȟȠȐȓțțȜȗ ȄȓșȓȐȜȗ ǻȎȡȥțȜ-ȀȓȣțȖȥȓȟȘȜȗ ǽȞȜȑȞȎȚȚȩ ȁȘȞȎȖțȩ «ǾȎȕȞȎȏȜȠȘȎ ȖȜȟȐȜȓțȖȓȚȖȘȞȜȫșȓȘȠȞȜțțȩȣȠȓȣțȜșȜȑȖȗ, ȜȞȑȎțȖȕȎȤȖȭȟȓȞȖȗțȜȑȜ ȐȩȝȡȟȘȎ ȝȞȖȏȜȞȜȐ Ȗ ȟȖȟȠȓȚ țȎ Ȗȣ ȜȟțȜȐȓ» (2008–2011 ȑȑ.)

ǮȐȠȜȞȩȜȠȒȎȬȠȟȓȏȓȜȠȥȓȠȐȠȜȚ, ȥȠȜȐȞȎȚȘȎȣȜȒțȜȗȚȜțȜȑȞȎȢȖȖ țȓȐȜȕȚȜȔțȜ ȜȠȞȎȕȖȠȪ Ȑȟȓ ȚțȜȑȜȜȏȞȎȕȖȓ ȭȐșȓțȖȗ, ȫȢȢȓȘȠȜȐ, ȚȓȣȎțȖȕȚȜȐ țȎȏșȬȒȎȓȚȩȣ Ȑ SiC Ȗ țȓ ȝȞȓȠȓțȒȡȬȠ țȎ ȖȟȥȓȞȝȩȐȎȬȧȓȓ ȖȕșȜȔȓțȖȓ ȕȎȠȞȜțȡȠȩȣ Ȑ țȓȗ ȐȜȝȞȜȟȜȐ, ȝȜȫȠȜȚȡ Ȑȟȓ ȝȜȔȓșȎțȖȭ Ȗ ȘȞȖȠȖȥȓȟȘȖȓ ȕȎȚȓȥȎțȖȭ ȝȜ ȚȎȠȓȞȖȎșȎȚ ȘțȖȑȖ ȏȡȒȡȠ ȝȞȖțȭȠȩ ȖȚȖ ȟ ȏșȎȑȜȒȎȞțȜȟȠȪȬ.

16 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ǹȖȠȓȞȎȠȡȞȎ

1.Advances in Silicon Carbide Processing and Applications / Ed. S.E. Saddow, A. Agarwal. – Boston-London: Arrech House. Inc., 2004.

2. SiC Materials and Devices / Ed. M. Shur, S. Rumyantsev,

M. Levinstein // World ScientiÀc. – 2007. – 1, 2.

3.Porous Silicon Carbide and Gallium Nitride. Epitaxy, Catalysis and Biotechnology Applications / Ed. R.M. Feenstra, C.E.C. Wood. – John Wiley & Sons. Ltd, 2008.

4.DZȎȞȦȖț Ǯ.ǽ. ǸȎȞȏȖȒ ȘȞȓȚțȖȭ. ǺȜțȜȘȞȖȟȠȎșșȩ, ȝȜȞȜȦȘȖ Ȗ ȖȕȒȓșȖȭ țȎ Ȗȣ ȜȟțȜȐȓ. – ǿ-ǽȓȠȓȞȏȡȞȑ: Ƕȕ-ȐȜ ȝȜșȖȠȓȣțȖȥȓȟȘȜȑȜ ȡțȖȐȓȞȟȖȠȓȠȎ, 2006.

5.ǰșȎȟȘȖțȎ ǿ.Ƕ., ǿȐȓȥțȖȘȜȐ DZ.ǿ., ǿȚȩțȠȖțȎ ǰ.Ǯ. ǽșȓțȘȖ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ. – ǼȒȓȟȟȎ: ǮȟȠȞȜȝȞȖțȠ, 2007.

6.DZȎȞȦȖț Ǯ.ǽ., ȆȡȚȭȑȓȞ ǰ.Ǻ., ǽȡȦȘȎȞȓȐ Ǽ.Ƕ. ǮȏȞȎȕȖȐȩ Ȗ ȚȎȠȓȞȖȎșȩ ȘȜțȟȠȞȡȘȤȖȜțțȜȑȜ țȎȕțȎȥȓțȖȭ țȎ ȜȟțȜȐȓ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ. – ǰȜșȑȜȑȞȎȒ: ǰȜșȑDZǮǿȁ, 2008.

7.ǮȑȓȓȐ Ǽ.Ǯ. ǽȞȜȏșȓȚȩ ȠȓȣțȜșȜȑȖȖ ȘȜțȠȎȘȠȜȐ Ș ȘȎȞȏȖȒȡ ȘȞȓȚțȖȭ. – ȀȎȑȎțȞȜȑ: ȀǾȀȁ, 2005.

8.ǮȑȓȓȐǼ.Ǯ. ǯȩȟȠȞȎȭ ȠȓȞȚȜȜȏȞȎȏȜȠȘȎ țȓȘȜȑȓȞȓțȠțȩȚ ǶǸ ȖȕșȡȥȓțȖȓȚ ȘȜțȠȎȘȠȜȐ Ș ȘȎȞȏȖȒȡ ȘȞȓȚțȖȭ. – ȀȎȑȎțȞȜȑ: ȀǾȀȁ, 2003.

9.ǿȓȥȓțȜȐ Dz.Ǯ., ǮȑȓȓȐ Ǽ.Ǯ., ǸȎȟȖȚȜȐ Ȃ.Dz., ǸȎȒȩȚȜȐ DZ.DZ. DZȎȕȜȥȡȐȟȠȐȖȠȓșȪțȩȓ ȒȎȠȥȖȘȖ țȎ ȜȟțȜȐȓ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ. – ǯȎȘȡ: ǺȡȠȎȞȒȔȖȚ, 2004.

10.ǸȎȟȖȚȜȐ Ȃ.Dz., DZȡȟȓȗțȜȐ ȍ.Ȍ., ǿȐȓȠșȖȥțȩȗ Ǯ.Ǻ., ǽȜșȭȘȜȐ ǰ.ǰ., ǸȜȥȓȞȜȐ Ǯ.ǻ. ȂȜȠȜȟȠȖȚȡșȖȞȜȐȎțțȩȓ ȝȞȜȤȓȟȟȩ ȜȘȖȟșȓțȖȭ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ. – ǯȎȘȡ: ǺȡȠȎȞȒȔȖȚ, 2005.

11.ǹȓȏȓȒȓȐ Ǯ., ǿȏȞȡȓȐ ǿ. SiC ȫșȓȘȠȞȜțȖȘȎ. ǽȞȜȦșȜȓ, țȎȟȠȜȭȧȓȓ, ȏȡȒȡȧȓȓ// ȋșȓȘȠȞȜțȖȘȎ: ǻȎȡȘȎ. ȀȓȣțȜșȜȑȖȭ. ǯȖȕțȓȟ. – 2006. –

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14.ǸȎșȖțȖțȎ dz.ǰ. ǰșȖȭțȖȓ ȜȏșȡȥȓțȖȭ țȎ SiC Ȗ ȝȞȖȏȜȞȩ țȎ ȓȑȜ ȜȟțȜȐȓ // ȂȀǽ. – 2007. – 41, Ɋ7. – ǿ. 769–805.

15.DzȎȐȩȒȜȐ ǿ.Ȍ. Ǽȏ ȫșȓȘȠȞȜțțȜȚ ȟȞȜȒȟȠȐȓ ȝȜșȖȠȖȝȜȐ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ // ȂȀǽ. – 2007. – 41, Ɋ6. – ǿ. 718–720.

16.DzȎțȖȦȓȐȟȘȖȗ Ǯ.Ǻ., ǾȜȑȎȥȓȐ Ǯ.Ǯ., ȆȡȚȎț ǰ.ǯ., DZȡȘ dz.DZ. ǽȜșȭȞȖȕȎȤȖȜțțȎȭ ȝȎȚȭȠȪ Ȑ ȝȜȞȖȟȠȜȚ ȜȘȖȟșȓțțȜȚ ȟșȜȓ SiC //

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17.ȆȡȚȎț ǰ.ǯ., ǾȎȠțȖȘȜȐ ǰ.ǰ., ǿȎȐȘȖțȎ ǻ.ǿ. ǰșȖȭțȖȓ șȓȑȖȞȜȐȎțȖȭ ȝȜȒșȜȔȘȖ țȎ ȝȎȞȎȚȓȠȞȩ ȝȜȞȖȟȠȩȣ ȟșȜȓȐ ȘȎȞȏȖȒȎ ȘȞȓȚ-

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18.ǶȐȎțȜȐǽ.Ǯ., ǹȓȐȖțȦȠȓȗțǺ.dz., ǺțȎȤȎȘȎțȜȐȀ.Ȁ., Palmour J.W., Agarwal A.K. ǺȜȧțȩȓ ȏȖȝȜșȭȞțȩȓ ȝȞȖȏȜȞȩ țȎ ȜȟțȜȐȓ ȘȎȞȏȖ-

ȒȎ ȘȞȓȚțȖȭ // ȂȀǽ. – 2005. – 39, Ɋ8. ǿ.897–913.

19.ǶȐȎțȜȐ ǽ.Ǯ., DZȞȓȣȜȐ Ƕ.ǰ., ǽȜȠȎȝȜȐ Ǯ.ǿ., ǿȎȚȟȜțȜȐȎ Ȁ.ǽ., ǶșȪȖțȟȘȎȭ ǻ.Dz., ǸȜțȪȘȜȐ Ǽ.Ƕ., ǿȓȞȓȏȞȓțțȖȘȜȐȎ Ǽ.Ȍ. Ǽȏ «ȖȕȏȩȠȜȥțȩȣ» ȠȜȘȎȣ ȡȠȓȥȘȖ Ȑ ȐȩȟȜȘȜȐȜșȪȠțȩȣ ȒȖȜȒȎȣ ȆȜȠȠȘȖ țȎ ȜȟțȜȐȓ 4H-SiC // ȂȀǽ. – 2010. – 44, Ɋ5. – ǿ. 680–683.

20.ǹȓȏȓȒȓȐ Ǯ.Ǯ., ȅȓșțȜȘȜȐ ǰ.dz. ȆȖȞȜȘȜȕȜțțȩȓ ȝȜșȡȝȞȜȐȜȒțȖȘȖ Ȓșȭ ȟȖșȜȐȜȗ ȫșȓȘȠȞȜțȖȘȖ // ȂȀǽ. – 1999. – 33, Ɋ9. –

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23.ǮȢȎțȎȟȪȓȐ Ǯ.ǰ., ǶșȪȖț ǰ.Ǯ., ǽȓȠȞȜȐ Ǯ.Ǯ. ǰȩȟȜȘȜȠȓȚȝȓȞȎȠȡȞțȩȓ ȒȖȜȒȩ ȆȜȠȠȘȖ țȎ ȜȟțȜȐȓ SiC // ǽȓȠȓȞȏȡȞȑȟȘȖȗ ȔȡȞțȎș ȫșȓȘȠȞȜțȖȘȖ. – 2000. – Ɋ3–4. – ǿ. 12–20.

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18 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

25.ǹȡȥȖțȖț ǰ., ǺȎșȪȤȓȐ ǽ., ǺȎșȭȘȜȐ dz. ǸȎȞȏȖȒ ȘȞȓȚțȖȭ ȟȠȞȎȠȓȑȖȥȓȟȘȖȗ ȚȎȠȓȞȖȎș ȫșȓȘȠȞȜțȖȘȖ ȏȡȒȡȧȓȑȜ // ȋșȓȘȠȞȜțȖȘȎ: ǻȎȡȘȎ. ȀȓȣțȜșȜȑȖȭ. ǯȖȕțȓȟ. – 1997. – Ɋ3–4. ǿ. 61–64.

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