1
.2.pdfPage 1
Зонная плавка 3.vi G:\ТМиЭТ\Зонная плавка 3.vi Last modified on 13.04.2018 at 15:23
Printed on 09.12.2018 at 17:08
Выращивание кристаллов методом зонной плавки |
Примесь 1 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|||||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
Исходные данные: |
|
|
|
Примесь 2 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|||
|
|
|
|
Примесь 3 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
Тип расчета |
|
|
1,00E+17 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
x, см |
C_T1(x) |
C_T2(x) |
C_T3(x) |
|
Материал |
1 |
Первая примесь |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,00 |
NaN |
45,99E+12 |
45,99E+12 |
|
2 |
Первая примесь летучая, вторая нелетучая |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,05 |
50,00E+15 |
46,76E+12 |
46,22E+12 |
||||
Ge |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|||||||||
3 |
Три графика для трех примесей |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,10 |
50,00E+15 |
47,53E+12 |
46,45E+12 |
|||
|
4 |
Первая примесь после одного прохода, вторая после многих |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,15 |
50,00E+15 |
48,29E+12 |
46,68E+12 |
||||
|
Примесь 1 |
|
Примесь 2 |
|
Примесь 3 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,20 |
50,00E+15 |
49,06E+12 |
46,91E+12 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,25 |
50,00E+15 |
49,82E+12 |
47,14E+12 |
||||
|
|
Zn |
|
Zn |
|
Zn |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,30 |
50,00E+15 |
50,59E+12 |
47,37E+12 |
|||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
||||
|
Условия выращивания: |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,35 |
50,00E+15 |
51,35E+12 |
47,60E+12 |
|||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,40 |
50,00E+15 |
52,12E+12 |
47,83E+12 |
||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
||||
Скорость |
f (мм/мин) (см/c) |
f (мм/мин) (см/c) |
f (мм/мин) (см/c) |
1,00E+16 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,45 |
50,00E+15 |
52,89E+12 |
48,06E+12 |
||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,50 |
50,00E+15 |
53,65E+12 |
48,29E+12 |
|||||||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
||||||
кристаллизации |
|
0,50 |
0,0008 |
0,50 |
0,0008 |
0,50 |
0,0008 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,55 |
50,00E+15 |
54,42E+12 |
48,52E+12 |
|||||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
||||
Длина расплавленной |
|
L0 (см) |
|
L0 (см) |
|
L0 (см) |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,60 |
50,00E+15 |
55,18E+12 |
48,75E+12 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,65 |
50,00E+15 |
55,95E+12 |
48,98E+12 |
|
зоны |
|
0,00 |
|
3,00 |
|
10,00 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,70 |
50,00E+15 |
56,71E+12 |
49,21E+12 |
||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
||||
Диаметр кристалла |
|
DКР (мм) |
(см) |
DКР (мм) |
(см) |
DКР (мм) |
(см) |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,75 |
50,00E+15 |
57,48E+12 |
49,44E+12 |
|
50,00 |
5,00 |
50,00 |
5,00 |
50,00 |
5,00 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,80 |
50,00E+15 |
58,25E+12 |
49,67E+12 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
||||||||||
|
|
L (см) |
|
L (см) |
|
L (см) |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,85 |
50,00E+15 |
59,01E+12 |
49,90E+12 |
Длина слитка |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,90 |
50,00E+15 |
59,78E+12 |
50,13E+12 |
|||
|
60,00 |
|
60,00 |
|
60,00 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
0,95 |
50,00E+15 |
60,54E+12 |
50,36E+12 |
||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|||||||
Начальная |
|
C0 (см-3) |
|
C0 (см-3) |
|
C0 (см-3) |
|
1,00E+15 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,00 |
50,00E+15 |
61,31E+12 |
50,59E+12 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,05 |
50,00E+15 |
62,07E+12 |
50,82E+12 |
||
концентрация примеси |
|
5,00E+16 |
|
5,00E+16 |
|
5,00E+16 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,10 |
50,00E+15 |
62,84E+12 |
51,05E+12 |
||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
||||
Концентрация примеси |
|
CП (см-3) |
|
CП (см-3) |
|
CП (см-3) |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,15 |
50,00E+15 |
63,61E+12 |
51,28E+12 |
в подпитывающем слое |
|
5,00E+16 |
|
5,00E+16 |
|
5,00E+16 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,20 |
50,00E+15 |
64,37E+12 |
51,51E+12 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,25 |
50,00E+15 |
65,14E+12 |
51,74E+12 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,30 |
50,00E+15 |
65,90E+12 |
51,97E+12 |
Справочные и рассчитанные параметры технолог. процесса: |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,35 |
50,00E+15 |
66,67E+12 |
52,20E+12 |
||||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,40 |
50,00E+15 |
67,43E+12 |
52,43E+12 |
|||||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
||||
Равновесный коэффициент |
k0 |
|
|
k0 |
|
k0 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,45 |
50,00E+15 |
68,20E+12 |
52,66E+12 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,50 |
50,00E+15 |
68,96E+12 |
52,89E+12 |
||||
распределения |
4,00E-4 |
|
4,00E-4 |
|
4,00E-4 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|||||
|
|
|
1,00E+14 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,55 |
50,00E+15 |
69,73E+12 |
53,12E+12 |
|||||
|
a |
|
|
a |
|
a |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,60 |
50,00E+15 |
70,50E+12 |
53,35E+12 |
||||
Линейный коэффициент |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|||||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|||||
0,00E+0 |
|
0,00E+0 |
|
0,00E+0 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,65 |
50,00E+15 |
71,26E+12 |
53,58E+12 |
||
испарения |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
||||||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,70 |
50,00E+15 |
72,03E+12 |
53,81E+12 |
|
Коэффициент диффузии |
D |
|
|
D |
|
D |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
||||
1,00E-4 |
|
1,00E-4 |
|
1,00E-4 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,75 |
50,00E+15 |
72,79E+12 |
54,03E+12 |
||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,80 |
50,00E+15 |
73,56E+12 |
54,26E+12 |
||||
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
||||
|
k |
|
|
k |
|
k |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,85 |
50,00E+15 |
74,32E+12 |
54,49E+12 |
Эффективный коэффициент |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,90 |
50,00E+15 |
75,09E+12 |
54,72E+12 |
|||
распределения |
9,20E-4 |
|
9,20E-4 |
|
9,20E-4 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
1,95 |
50,00E+15 |
75,85E+12 |
54,95E+12 |
|
Приведенный |
kИ |
|
|
kИ |
|
kИ |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2,00 |
50,00E+15 |
76,62E+12 |
55,18E+12 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2,05 |
50,00E+15 |
77,38E+12 |
55,41E+12 |
|
коэффициент испарения |
0,00E+0 |
|
0,00E+0 |
|
0,00E+0 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|||||
|
|
|
1,00E+13 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
2,10 |
50,00E+15 |
78,15E+12 |
55,64E+12 |
|||||
|
kОБ |
|
kОБ |
|
kОБ |
|
|
|
|
10,0 |
12,5 |
15,0 |
17,5 |
20,0 |
22,5 |
25,0 |
27,5 |
30,0 |
32,5 |
35,0 |
37,5 |
40,0 |
42,5 |
45,0 |
47,5 |
50,0 |
52,5 |
55,0 |
57,5 |
60,0 |
||||||
Обобщенный коэффициент |
|
|
|
0,0 |
2,5 |
5,0 |
7,5 |
2,15 |
50,00E+15 |
78,92E+12 |
55,87E+12 |
|||||||||||||||||||||||||
распределения |
9,20E-4 |
|
9,20E-4 |
|
9,20E-4 |
|
|
|
|
|
|
|
|
|
|
|
|
|
x, см |
|
|
|
|
|
|
|
|
|
|
|
|
2,20 |
50,00E+15 |
79,68E+12 |
56,10E+12 |
|
|
k*C0 |
|
k*C0 |
|
k*C0 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
4,60E+13 |
|
4,60E+13 |
|
4,60E+13 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|